| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-04 |
| filingDate |
2015-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ccf8de3d565306eaf12e7c65d0dddc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_001664635dd539875cc4771557c36408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9da225554df0144657bbe981e528c192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a3cbff347b5ce36e8992af6be3ee2ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ca8d884f5b95e6e4ec16fb875e3881e |
| publicationDate |
2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201932298-A |
| titleOfInvention |
Plasma-resistant coating for high temperature applications |
| abstract |
An article such as a pedestal includes a body of thermally conductive semi-metal coated on the surface of the body by a first protective layer and a second protective layer. The first protective layer is a thermally conductive ceramic. The second protective layer covers the first protective layer and is a plasma-resistant ceramic film resistant to cracking at a temperature of 650 °C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I778587-B |
| priorityDate |
2014-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |