Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4195088374a7fca162ca5d84b50ee25 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-00495 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-00902 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4417 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-1872 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-1836 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-1827 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-08 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-442 |
filingDate |
2015-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a19df079a4d5c70ab188e07ceec9e2b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30fb13c25aedcd5c0f27a61aa033ab4a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8b274c6d111fcd565ee3d6b76bf9b4c |
publicationDate |
2019-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201930631-A |
titleOfInvention |
Tantalum deposition reactor with bottom seal configuration |
abstract |
The invention discloses a fluidized bed reactor system for producing high-purity silicon-coated particles. A container has: an outer shell; an insulating layer positioned inside the outer shell; a concentric inner shell positioned inside the outer shell; and a concentric gasket positioned inside the outer shell The inside of the housing and defines a reactor chamber. The inner shell and the gasket are sealed together at their bottoms by an O-ring seal arrangement to prevent gas in the reactor chamber from entering the space between the inner shell and the gasket . A central inlet nozzle produces a vertical plume of gas in the reactor chamber. |
priorityDate |
2014-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |