| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-00929
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-00902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F23-191
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J8-22 |
| filingDate |
2018-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f159d370fe7cb3cf208e194c5079b3b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_227c0da8f2e2a2d95fffcdc89a51a04c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29fab25e0005eb969a06cb5f90b21e29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6a84cfb21aee2a9addff6d480228a42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b3fde0e1eab19f30b0ece8488038e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df3166a69e1a7ac2678454529a811014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fb79286b69100f131453fb9cfba5b17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99d94ca7dab5530b2862fcaf0c2aa262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6aa570d72ce6de75278c96d7c5a7df14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_450e907e1039fbbd9510931316dd92b5 |
| publicationDate |
2019-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201926506-A |
| titleOfInvention |
Gas injector with deflector |
| abstract |
Gas injectors for providing a uniform fluid flow are provided herein. The gas injector includes an inflatable body. The inflatable body includes a recess, a protrusion adjacent the recess and extending laterally away from the inflatable body, and a plurality of nozzles extending laterally from an outer surface of the inflatable body. The inflatable body has a plurality of holes in the outer wall of the inflatable body. Each nozzle is in fluid communication with an interior volume of the inflatable body. The gas injector provides uniform deposition by directing fluid flow. |
| priorityDate |
2017-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |