| abstract |
A method is provided, which includes the following operations: depositing a ruthenium liner in a feature portion of a substrate; depositing a single layer of zinc over the ruthenium liner; and after depositing the single layer of zinc, performing a heat treatment on the substrate, wherein the heat treatment is used for Causes the migration of the zinc to the interface between the ruthenium liner and the oxide layer of the substrate. The migration of zinc creates an adhesive barrier at the interface, which improves the adhesion between the ruthenium liner and the oxide layer of the substrate. ; Repeat the operation of depositing the single layer of zinc and performing the heat treatment until a predetermined number of cycles are reached. |