| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e0bf0928b608797b70bbc2b91c7e52e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D265-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate |
2018-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e82d19c7fe263e92df99113f575926b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9599027b1a642963a92c0e2db240b6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bdbbf1d9f05b0b403644b65caf0fe60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b24b2af2ed6518e5ec8479e82f2a058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfa01371771ddb0036d9357b0a6b76b4 |
| publicationDate |
2019-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201925428-A |
| titleOfInvention |
Composition and method for selectively etching a layer comprising an aluminum compound in the presence of a layer of low-K material, copper and/or cobalt |
| abstract |
The present invention describes a composition for selectively etching a layer comprising an aluminum compound in the presence of a layer of low-k material and/or a layer comprising copper and/or cobalt and the corresponding use of the composition. Further described is a method for fabricating a semiconductor device comprising selecting in the presence of a layer of a low-k material and/or a layer comprising copper and/or cobalt by contacting at least one layer comprising an aluminum compound with the composition The step of etching the at least one layer containing the aluminum compound is performed. |
| priorityDate |
2017-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |