| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2018-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf014b8845cbb7480df904347f952588
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_531d25acf6a51380bad49e52d0aa34a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d749de30961816922ab0c041ea2ec1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e03dd780d43ff0bd8102e765041e7a40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9acf079327f1e2490742e727a5a738a |
| publicationDate |
2019-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201923817-A |
| titleOfInvention |
Plasma processing method |
| abstract |
The invention provides a plasma processing method for homogenizing plasma density distribution when performing plasma processing. The plasma processing method of one embodiment is implemented in a state where the workpiece is contained in the internal space of the chamber body. The plasma processing method includes the following steps: (i) performing the first plasma processing on the processed object; and (ii) performing the second plasma processing on the processed object. The power of the second radio frequency signal set in the step of performing the second plasma processing is larger than the power of the second radio frequency signal set in the step of performing the first plasma processing. In the step of performing the second plasma treatment, a magnetic field distribution is formed by the electromagnet, and the magnetic field distribution has a horizontal component larger than the horizontal component on the center of the object on the edge side of the object. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11699571-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I790736-B |
| priorityDate |
2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |