abstract |
An object of the present invention is to provide a step-difference substrate coating composition for forming a film having filling and planarizing properties for a pattern. The solution is a stepped substrate coating composition, which contains a main agent and a solvent, and is cured by light irradiation, or a stepped substrate coating which is cured by heating at 30 ° C. to 300 ° C. during or after light irradiation. A composition wherein the main agent contains the following compound (A), compound (B), or a mixture of these, and the compound (A) includes the following formula (A-1) or formula (A-2): Partly constructed compounds, The compound (B) contains at least one partial structure selected from the group consisting of partial structures represented by the following formula (B-1) to formula (B-5), or contains a partial structure represented by formula (B-6) Compounds of partial structure composed of combination with partial structures represented by formula (B-7) or formula (B-8), The content of the above-mentioned main agent in the solid content of the composition is 95% by mass to 100% by mass. |