| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f96aa5fb688ac46af62a9c8bbdc3e970 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02809
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-2697
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M3-3236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N35-00 |
| filingDate |
2018-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_722fc4eabd3a371eb59292b6e34e1209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2de9ddd0d8e8a6ac13f184b7eb66a1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36257feb41a135ad98d3b2418e6dc037 |
| publicationDate |
2019-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201920907-A |
| titleOfInvention |
Quartz crystal microbalance sensor for manufacturing process monitoring and related methods |
| abstract |
A monitoring device for monitoring a production process in a production system is provided. The monitored production system includes a processing room and multiple flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of multiple flow components of the production system and is configured to be exposed to process chemicals in one flow component during the production process. The controller measures the resonance frequency shift of the QCM sensor caused by the interaction between the QCM sensor and the process chemicals in a flow assembly during the manufacturing process. The controller determines the parameters of the manufacturing process in the processing room based on the measured resonance frequency shift of the QCM sensor in a flow component. |
| priorityDate |
2017-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |