http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201919102-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd36137cd003335b7b418ec4b2036c72 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2018-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ece645e5c00f29ff233f5cf310629873 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3078236ca91280769b257feea7a51d50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e777d3640c1aaea94a402afe29ee69aa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1965392ef3d1095e329c09b7ec0a1f5f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f48c9c40dfaed0810453f03225ecd0a |
| publicationDate | 2019-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201919102-A |
| titleOfInvention | Semiconductor device manufacturing apparatus and semiconductor device manufacturing method |
| abstract | The present invention provides a semiconductor device manufacturing apparatus and a semiconductor device manufacturing method which have an effective electrostatic removal effect, are excellent in cleanliness, and are excellent in chemical resistance.n n n The device for manufacturing a semiconductor device of the present invention comprises: a holder having a chuck pin and/or a wafer pin to hold the semiconductor wafer; and a nozzle for supplying a cleaning liquid, an etching liquid or a resist liquid; The manufacturing device of the device, wherein the nozzle comprises a resin molded body of a composite resin material containing at least one fluororesin and a carbon nanotube; and/or selected from the group consisting of a pin, a wafer pin, and a seat At least one of them is a resin molded body comprising a composite resin material containing at least one type of fluororesin and a carbon nanotube. |
| priorityDate | 2017-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.