| abstract |
The present invention provides a radiation-sensitive resin composition, a semiconductor device, a display device, a cured film, and a process thereof, which are excellent in radiation sensitivity and storage stability, and which can obtain a patterned film having high resolution and low corrosivity to metal wiring. method. A radiation sensitive resin composition comprising: a polymer component (A) having a structure containing an aromatic ring and an alkoxyalkyl group directly bonded to the aromatic ring in the same or different polymer Unit (I) and structural unit (II) containing an acidic group; a radiation sensitive compound (B); an organic solvent (D); and water (E); and the content of the water (E) is 10 wtppm or more, 800 Below wtppm. |