Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_137c3c634433cc850a4c225c98c489c4 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-20 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
filingDate |
2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b0aff8610a355b8e05dcbe0189b0072 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f6990bdea825fb0377947314bf9e9f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8a491f9620098ca3620933aa25dccb3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a5d446ad47c0e4eff155b583076ff05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f811c5ed9110e4c9b6e04f62affdc1ea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b708c97d0d3320850f176d3c0410a3ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a0d0d634402dfc73bbf817d858cf5d0 |
publicationDate |
2019-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201913858-A |
titleOfInvention |
Heater assembly |
abstract |
The present invention relates to a heater assembly mounted on a soldering apparatus for soldering a wafer, the heater assembly according to an embodiment of the present invention comprising: a heater board including a first outer peripheral surface and a second outer peripheral surface on the first outer peripheral surface Supporting the semiconductor structure to be processed in contact with each other; the electrically insulating body is disposed on the second outer peripheral surface side of the heating plate for supporting the heating plate; and two or more bus bars are disposed on the above Between the heating plate and the electrically insulating body described above, for heat release and power application of the above heating plate. |
priorityDate |
2017-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |