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publicationDate 2019-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201911973-A
titleOfInvention Integrated X-ray source
abstract Disclosed herein is an X-ray source including: a cathode in a recess of a first substrate; a counter electrode on a sidewall of the recess, which is configured to cause field emission of electrons from the cathode; and a metal anode, which It is configured to receive electrons emitted from the cathode and emit X-rays by electron collision on the anode of the method.
priorityDate 2017-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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