| abstract |
The gas supply member includes a first side opposite to the second side and an inner surface defining the first opening, the inner surface extending between the first side and the second side. The gas supply member includes a third side orthogonal to the first side, the third side includes a first extension, the first extension has a surface partially defining the second side, and the first extension includes a first extension Part to the first plurality of holes on the surface. The gas supply member includes a fourth side opposite to the third side, and the fourth side includes a convex portion having a face that partially defines the second side. The gas supply member also includes a baffle disposed adjacent to the inner surface, the baffle including a first portion extending from the inner surface and a second portion attached to the first portion, and the second portion is orthogonal to the first portion and parallel to the third side . |