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publicationDate 2019-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201910291-A
titleOfInvention Alumina sintered body, method of manufacturing the same, and part for semiconductor manufacturing apparatus
abstract An alumina sintered body in which one or more selected from tantalum (Ta), niobium (Nb) and vanadium (V) contains 0.01 to 1.0 mass percent in terms of oxide. This alumina sintered body may further contain magnesium (Mg) to contain 0.01 to 1.0% by mass in terms of oxide. In particular, the alumina sintered body preferably has an alumina purity of 99% or more. By this, an alumina sintered body having a dielectric loss lower than that of the prior art can be obtained at low cost.
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