http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201908750-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02013 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2018-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a431a6911a410fffa6b66b36b9f87890 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e905fecc9341392ed10f0f8e5d3411a9 |
| publicationDate | 2019-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201908750-A |
| titleOfInvention | 评价 Wafer manufacturing program evaluation method and 矽 wafer manufacturing method |
| abstract | [Question] Provide a means for stably mass-producing good-quality silicon wafers by using life-cycle inspection to suppress the occurrence of defective products. [Solution] An evaluation method of a silicon wafer manufacturing process for mass-producing a plurality of silicon wafers. For each silicon wafer at different positions in the plane, the lifetime of the silicon wafer that has been mass-produced is tested to obtain a plurality of measured values. A representative value of each silicon wafer was obtained from the plurality of measured values. For each wafer group composed of a plurality of silicon wafers, a determination threshold is obtained using a representative value of each silicon wafer included in the wafer group. Determine whether the wafer group includes silicon wafers in which the plurality of measured values obtained for each of the silicon wafers include lifetime abnormal values determined based on the determination threshold, and determine whether the manufacturing process is likely to produce defective products Manufacturing process. |
| priorityDate | 2017-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 21.