http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201907549-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-144 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
filingDate | 2018-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d183d06cb5b63e7edd7b5e51ccf8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_418adfc5c521106563c7c05c50a58134 |
publicationDate | 2019-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201907549-A |
titleOfInvention | Method for manufacturing infrared light-receiving element, method for manufacturing photosensor, laminated body, photoresist composition and kit |
abstract | Provided is a method for manufacturing an infrared light-receiving element and a method for manufacturing a photo sensor that can detect infrared S / N ratios. Furthermore, a laminate, a photoresist composition and a set are provided. In the method for manufacturing an infrared light-receiving element of the present invention, after forming a pattern of a photoresist film with a thickness of 5 μm or more on a support using a photoresist composition, the pattern of the photoresist film is used as a mask to ion implant the support . Furthermore, in the method of manufacturing the photo sensor of the present invention, the infrared light receiving element is manufactured by the method of manufacturing the infrared light receiving element of the present invention, and then, at least a part of the region where ion implantation is performed in the infrared light receiving element is formed The infrared ray that filters visible light and transmits at least a part of the infrared ray transmits the filter layer. |
priorityDate | 2017-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 236.