http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201907135-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_04c0750009f57a981b27e6ad72cfa581 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2210-56 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17 |
| filingDate | 2018-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbc1526c2078aac624a67655bd23cad7 |
| publicationDate | 2019-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201907135-A |
| titleOfInvention | Film thickness measuring system and method |
| abstract | The invention discloses a film thickness measurement system and method. The measurement system includes: a lens assembly configured to receive reflected light from the measured sample, and dividing the reflected light into at least a first reflected light and a second reflected light; an imaging unit configured to receive the first reflected light, To obtain imaging data of the surface of the measured sample, the imaging data includes distribution information of at least one measured area in at least one detection area of the measured sample; and a film thickness measurement unit configured to receive the second reflected light for obtaining Film thickness data of at least one measured area; and a processing unit that is communicatively connected to the imaging unit and the film thickness measurement unit and is configured to cause the film thickness measurement unit to obtain position information of the at least one measured area based on the distribution information And determine the film thickness data of the measured area based on the location information. |
| priorityDate | 2017-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569950 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23991 |
Total number of triples: 15.