| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32853 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-12 |
| filingDate |
2018-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d4efb466fa2c02b8be3289f70ce1520
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d9d6ff89134e5749141a863b7dc6d2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65fd983793de83404fb384d54a27a25f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44beb4e9bb8320caa3e0e6985c7dfe19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7344aa3bb20f38f0625950e08ef91f0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef86f5c96483a8d2581aae3b4058e0c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a59c52e18be37bc3574065d5de7ffa72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6700654df0f17e209be2ab02283299f1 |
| publicationDate |
2019-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201906670-A |
| titleOfInvention |
Regulating chamber components |
| abstract |
Provided herein is an apparatus for conditioning components of a processing chamber. A tank is provided to maintain the megahertz ultrasonic conditioning solution. When the tank is filled with a megahertz ultrasonic conditioning solution, the mount is used to hold the components immersed in the megahertz ultrasonic conditioning solution. The Megahertz Ultrasonic Conditioning Solution inlet system delivers a Megahertz Ultrasonic Conditioning Solution to the tank. The Megahertz Ultrasonic Transducer Head contains at least one million Hz ultrasonic transducer to provide megahertz ultrasonic energy to a megahertz ultrasonic conditioning solution, where the megahertz ultrasonic energy is via megahertz The ultrasonic wave is adjusted to the solution and delivered to the component. The Megahertz Ultrasonic Conditioning Solution Drainage System drains the Megahertz Ultrasonic Conditioning Solution from the slot where the component is held above the megahertz ultrasonic conditioning solution. The actuator moves the megahertz ultrasonic transducer head over the slot. |
| priorityDate |
2017-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |