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publicationDate 2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201906193-A
titleOfInvention Encapsulated substrate, manufacturing method and high energy gap component having the same
abstract An encapsulated substrate comprising: a zinc oxide substrate having an active surface, a zinc oxide material having a wurtzite lattice structure; and a composite barrier layer comprising: a first thin film layer, which is different from oxidation a first material of zinc; a second film layer covering the surface of the first film layer; a second material different from zinc oxide and the first material; and a plurality of layers sequentially formed on the second film layer Adding a thin film layer, each of the accumulated thin film layers is different from the adjacent accumulated thin film layer and/or the second thin film layer; and an active layer formed on the composite barrier layer and corresponding to the active surface, the active layer has a A material that is different from zinc oxide.
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