| abstract |
A micro-electromechanical systems (MEMS) converter for interacting with a volume flow of a fluid includes a substrate including a layer stack having a plurality of layers, and the plurality of layers forming a plurality of layers. The substrate is planar and includes a cavity within the layer stack. The MEMS transducer includes an electromechanical transducer connected to the substrate in the cavity, and includes an element deformable in at least one motion plane of the plurality of substrate planes, and the deformable element is in the motion plane. Deformation is causally related to the volume flow of the fluid. The MEMS transducer includes an electronic circuit disposed within one of the layer stacks, the electronic circuit being connected to the electromechanical transducer and configured to provide a transition between deformation of the deformable element and an electrical signal. |