http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201900795-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
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filingDate 2014-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7c81e8d75e496c799ca67e5901940bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59a5c03532a0c0f3d06f9ddb862a397d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_523e5f0c7418f04134cf08ce1d859e56
publicationDate 2019-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201900795-A
titleOfInvention Grinding composition and polishing method of tantalum wafer
abstract The present invention provides a polishing composition, which is a polishing composition for polishing a silicon wafer, and is characterized by containing a water-soluble polymer and water, and the water-soluble polymer satisfies the following conditions: SP containing no hydroxyl group The repeating unit whose value does not reach 14.5, the amount of hydroxyl groups is 4 mmol / g or more and 21 mmol / g or less, and is nonionic. In addition, the present invention provides a method for polishing a silicon wafer, comprising: preparing a polishing liquid containing the aforementioned polishing composition; supplying the aforementioned polishing liquid to a silicon wafer as a polishing object; The polishing liquid polishes the surface of the polishing object made of silicon. .
priorityDate 2013-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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