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filingDate 2018-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201843168-A
titleOfInvention Metal triamine compound, preparation method thereof, composition for depositing metal-containing film containing same, and method for preparing metal-containing film using same
abstract The present invention provides a novel metal triamine compound, a preparation method thereof, a composition for depositing a metal-containing film containing the same, and a method for preparing a metal-containing film using the same, and the metal triamine compound of the present invention has excellent reactivity, It is thermally stable, has high volatility, and has high storage stability, and therefore, it can be used as a metal-containing precursor to easily prepare a high-purity metal-containing film having a high density.
priorityDate 2017-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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