abstract |
The invention is a radiation-sensitive composition containing particles and a solvent, the particles comprising: a hydrolysate or a hydrolyzed condensate of a metal compound having a hydrolyzable group or a combination thereof; and an organic acid or an anion of the organic acid The first compound represented by the following formula (1) or a combination thereof, the molecular weight of the organic acid and the first compound is 120 or more. In the following formula (1), R 1 is an n-valent organic group. X is an alcoholic hydroxyl group, -NCO, or -NHR a . R a is a hydrogen atom or a monovalent organic group. n is an integer of 2 to 4. |