| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2518-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2350-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F293-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F287-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F299-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3083 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D153-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F297-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L53-00 |
| filingDate |
2018-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88aa49faad4cf70318f887946d799b49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d338fa9da212910df6f0916095817b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b017ab90ebb5e3f9c0d200a1fb4322f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe60277c47087e372b44e2f1e215cb7a |
| publicationDate |
2018-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201842043-A |
| titleOfInvention |
Self-organized film forming composition for forming a fine phase separation pattern |
| abstract |
The present invention provides a fine phase separation structure for a layer containing a block copolymer, even at a high heating temperature that causes poor alignment due to fine phase separation of the block copolymer. A self-organizing film-forming composition that is perpendicular to the substrate. It is a self-organizing film-forming composition, which is a self-organizing film-forming composition containing a block copolymer and at least two kinds of solvents having different boiling points as solvents. The above-mentioned block copolymer is composed of Styrene or its derivative or a silicon-free polymer as a structural unit produced from lactide (Lactide) is bonded to a silicon-containing polymer as a structural unit by a styrene substituted with a silicon-containing group. The obtained block copolymer includes the following solvents: a low-boiling-point solvent (A) having a boiling point of 160 ° C. or lower, and a high-boiling-point solvent (B) of 170 ° C. or higher. |
| priorityDate |
2017-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |