http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201838008-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0f2776bcc27d5099aa97f3212e1681 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-56 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-364 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26D3-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3043 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-364 |
filingDate | 2018-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c29f453808fe9a6e10cd2122be801a5 |
publicationDate | 2018-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201838008-A |
titleOfInvention | processing methods |
abstract | [Problem] To provide a processing method capable of maintaining the quality of processing and increasing the processing speed when processing a plate-like workpiece to be laminated on a predetermined cutting line to form a laminated body including metal. [Solution] A processing method for processing a plate-shaped workpiece having a laminated body containing a metal on a front side, wherein the laminated body is formed by overlapping on a predetermined cutting line, and the processing method includes the following steps: Steps to hold the front side of the workpiece with a holding table; laser processing step, after the holding step is performed, lasers with a wavelength absorptive to the workpiece are irradiated along the predetermined cutting line and toward the back of the workpiece A laser beam to form a laser processing groove that does not reach the multilayer body; and a cutting step, after the laser processing step is performed, the bottom of the laser processing groove is cut with a cutting blade, and the object to be processed is cut along a predetermined cutting line The cutting is performed together with the laminated body, and in the cutting step, cutting is performed while supplying a cutting liquid containing an organic acid and an oxidizing agent to a workpiece. |
priorityDate | 2017-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 125.