http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201834015-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D29-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D15-361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D36-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-3092 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2018-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9cc9ccffa31b8a092f6edd7dcb7a989 |
| publicationDate | 2018-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201834015-A |
| titleOfInvention | Method for producing chemical liquid and manufacturing device for chemical liquid |
| abstract | An object of the present invention is to provide a method for producing a chemical solution capable of producing a chemical solution having excellent defect suppression performance. The manufacturing method of the medicinal solution of the present invention is a method for manufacturing a medicinal solution containing a medicinal solution containing an organic solvent by using a manufacturing device. Step B of extracting the cleaning solution from the manufacturing device, and repeatedly performing Steps A and B after performing step A and step B, until the cleaning solution extracted from the manufacturing device satisfies the following condition 1; and a preparation step, the medicine is prepared by the manufacturing device liquid. Condition 1: A cleaning liquid is applied to a substrate, and a change in particle density of a particle diameter of 20 nm or less on the substrate before and after the cleaning liquid is applied is 0.5 particles / cm 2 or less. |
| priorityDate | 2017-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.