http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201831738-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-06 |
| filingDate | 2018-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2fd2e116fe2ed2165a94c21b9b5f4ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48c6b8b2c53d4dd1d9c4f78f43990cdc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_814c9eb8188c14bf1b10c001ae7cddbf |
| publicationDate | 2018-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201831738-A |
| titleOfInvention | Plating device, substrate holder for use with plating device, plating method, computer program, and computer readable recording medium |
| abstract | The present invention provides a plating apparatus, a substrate holder for use with a plating apparatus, a plating method, a computer program, and a computer readable recording medium. The plating apparatus is capable of individually controlling the plating process on the front and back surfaces of the substrate, and the substrate holder can be used in such a plating apparatus. Provided is a substrate holder for holding a substrate as a plating object in a plating process, the substrate holder having a body portion for holding the substrate, the body portion having a first opening portion and a second opening portion, the body portion constituting When the substrate is held on the main body portion, the plated region on the surface of the substrate is exposed through the first opening portion, and the plated region on the back surface of the substrate is exposed through the second opening portion, and at least the outer peripheral portion of the main body portion is exposed. A part has a sealing portion that protrudes from the outer peripheral portion. |
| priorityDate | 2017-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484996 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7809 |
Total number of triples: 27.