http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201823257-A

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publicationDate 2018-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201823257-A
titleOfInvention Use of a bridged methyl group-based alkyl compound for a dense OSG film
abstract A low-dielectric material and a film including the same, which have been identified as having improved performance when used in an integrated circuit as an interlevel dielectric; and a manufacturing method thereof.
priorityDate 2016-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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