| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7443f9fa412762a1a5ba8390a27fc5e3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2075-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C39-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C39-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L75-04 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K75-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C41-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
| filingDate |
2017-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e43905af09a7f7bf4d7fcdf408e048c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2641c168b87431387fe0e06f68329a36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1cabcc7a06575ed2f5b7acc86029dce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37f97cefe5135021cfb38f80e21bf186 |
| publicationDate |
2018-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201822982-A |
| titleOfInvention |
Method for manufacturing a chemical mechanical planarization (CMP) polishing pad having an integral window |
| abstract |
The present invention provides a method of manufacturing a chemical mechanical planarization (CMP) polishing layer or polishing pad, which includes: providing an open mold having a surface with a concave topography that produces a flat or shaped CMP polishing layer surface and having a retention One or more end-point detection windows at appropriate positions on it; mixing the liquid isocyanate component and the liquid polyol component to form a solvent-free reaction mixture; spraying the reaction mixture onto the open mold while The one or more windows are held in place, each window is at a predetermined position, and then the reaction mixture is cured. |
| priorityDate |
2016-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |