http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201820936-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2366 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2017-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9de59664ac0c9bf9d83668bc18384845 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d08022264093f3cbb7fb8e7ff15cc2c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e104292180a5e3db0bb13bad6d3f1569 |
| publicationDate | 2018-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201820936-A |
| titleOfInvention | Target trajectory weights and measures in extreme ultraviolet light sources |
| abstract | The present invention describes a method for measuring a moving attribute of an object. The method includes forming a residual plasma that at least partially coincides with an extended target area, the residual plasma being an electrical charge formed from an interaction in a target space between a previous target and a previous radiation pulse. Release a current target toward the target space along a trajectory, the trajectory at least partially overlapping the extended target area; when the current target is within the extended target area and a previous and adjacent target is already on the target Determine one or more moving attributes of the current target after interacting with a previous radiation pulse in space; and if any of the determined one or more moving attributes of the current target exceeds an acceptable range, then One or more characteristics of a radiation pulse directed towards the target space are adjusted. |
| priorityDate | 2016-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.