| abstract |
The metal coordination complex comprises a metal atom coordinated to at least one aza-allyl ligand having a structure represented by the formula: Wherein each R 1 -R 4 is independently selected from H, branched or unbranched C1-C6 alkyl, branched or unbranched C1-C6 alkenyl, branched or unbranched C1-C6 alkynyl, A group consisting of a cycloalkyl group, a decyl group, and a halogen in the range of 1 to 6 carbon atoms. Methods of depositing thin films using metal coordination complexes and suitable reactants are also described. |