| abstract |
The gas supply device of the present invention is a gas supply device for supplying a gaseous compound vaporized from a liquid compound to a target, and has a storage container capable of accommodating the liquid compound, one end of which is connected to the storage container, and the other end of which can be disposed in the foregoing A temperature control device that controls the temperature of the gas compound supply pipe at the target and the temperature of the gas compound or liquid compound in the storage container to a temperature below the temperature of the gas compound supply pipe. |