| abstract |
The present invention contains a polymerizable monomer (M), an alkali-soluble elastomer (P) having a polymerizable group, a fluorene imine compound (Z) represented by the following general formula (z-1), and a polymerization initiator A composition for forming an interlayer insulating film, an interlayer insulating film containing the polymer, a method for forming an interlayer insulating film pattern, and a device provided with the aforementioned interlayer insulating film on a support.nn n n In the formula (z-1), R 1 and R 2 represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. R Z 00 represents a divalent organic group containing an aliphatic hydrocarbon group and / or an aromatic hydrocarbon group. R Z 01 and R Z 02 represent an alkyl group or an alkoxy group. n 1 and n 2 are 0 or 1. |