http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201806728-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-161 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate | 2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0de78db2b49186c71fcb7cdd2f1bcea5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_816b0f1451639cc7d117394ad0744dec |
| publicationDate | 2018-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201806728-A |
| titleOfInvention | Cured substrate pretreatment composition in nanoimprint lithography |
| abstract | A nanoimprint lithography method includes disposing a pretreatment composition on a nanoimprint lithography substrate to form a pretreatment coating, and disposing a discrete portion of the imprint resist on the pretreatment coating The discrete portions of the imprint resist cover the target area of the nanoimprint lithographic substrate. The imprint resist is a polymerizable composition and includes a polymerization initiator. When each discrete portion of the imprint resist spreads beyond its target area, a composite polymerizable coating is formed on the nanoimprint lithography substrate. The composite polymerizable coating is in contact with the nanoimprint lithography template. The polymerization initiator is activated, and the composite polymerizable coating is polymerized to produce a composite polymeric layer and the uncured portion of the coating is processed before the nanoimprint lithography substrate. After polymerizing the composite polymerizable coating to produce the composite polymeric layer, the uncured portion of the pretreatment coating is polymerized. |
| priorityDate | 2016-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 149.