| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d134eb79512ea6464bb92963fc5bb6f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2017-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d260ed63bd0a6c4d87a14284b3075d3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f45c08298a6d6bf1f0b78c1d4f817f83
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_547fe85f88b27ae311adb51b9b49dbf6 |
| publicationDate |
2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201805400-A |
| titleOfInvention |
Abrasive grain, method for producing the same, polishing slurry containing the same, and polishing method using the same |
| abstract |
The abrasive grains of the present invention include abrasive grains having inorganic abrasive particles whose surface is coated with an additive and whose pH is 8 or less and whose zeta potential is positive. The additive is preferably picolinic acid or glutamic acid. The inorganic abrasive particles are preferably cerium oxide particles. Abrasive particles containing cerium oxide particles whose surface is coated with picolinic acid or glutamic acid and having a pH value of 8 or less and a positive zeta potential are obtained by a step of wet pulverizing cerium oxide in the presence of picolinic acid or glutamic acid Abrasive particles produced by a method for producing abrasive particles. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020391343-A1 |
| priorityDate |
2016-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |