| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_950bce8d103dab1bd282965fde47f9f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J11-28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21F1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32559
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 |
| filingDate |
2017-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d697b3fc933f312f9742cece4c524adb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85060583cc9d588a6eaec209523114f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b1b224bd3329f788a969308a059c164 |
| publicationDate |
2018-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201801121-A |
| titleOfInvention |
Improved ion source repellent cap |
| abstract |
An arcuate chamber has a gasket operatively coupled to the body. The liner has a second surface recessed from a first surface and a hole having a first diameter. The pad has a pad edge extending upwardly from the second surface toward the first surface, the pad edge surrounding the aperture and having a second diameter. An electrode has a shaft member and a head. The shaft member has a third diameter that is smaller than the first diameter and passes through the body and the bore and is electrically isolated from the gasket by an annular gap. The head has a fourth diameter and a third surface, the third surface having an electrode edge extending downwardly from the third surface toward the second surface. The electrode edge has a fifth diameter between the second diameter and the fourth diameter. A spacing between the edge of the pad and the edge of the electrode defines a labyrinth seal and substantially prevents contaminants from entering the annular gap. The shaft member has an annular groove configured to receive a boron nitride seal. |
| priorityDate |
2016-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |