| abstract |
The present invention provides a method for manufacturing a diamond substrate with few differential defects and suppressing the occurrence of abnormally grown particles. The method for manufacturing a diamond substrate includes a first step of providing a patterned diamond on a surface of a substrate, and a second step of removing heterogeneous deposits adhering to a wall surface of the patterned diamond provided in the first step; A third step of growing diamonds from the patterned diamonds provided in the first step, and forming a diamond in a pattern gap among the patterned diamonds provided in the first step. |