| abstract |
Provided are a method for manufacturing a diamond substrate in which the difference in row defects can be sufficiently reduced, and a high-quality diamond substrate and a diamond self-supporting substrate. The method for manufacturing a diamond substrate is characterized in that it includes a first process of setting patterned diamonds on a substrate surface, growing the patterned diamonds from the first process, and growing the patterned diamonds of the first process. In the pattern gap in the second process of forming diamonds, the patterned diamond set in the first process is removed, the third process of patterned diamonds formed by the diamonds formed in the second process, and the pattern formed from the third process The fourth process is the growth of diamonds and the diamond formation in the pattern gap among the patterned diamonds formed in the third process. |