| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2239-0464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-2027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-2068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C19-08 |
| filingDate |
2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24b686155c13e2e77c008488679089a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0719686974142d8ab76f84103d5b9aa2 |
| publicationDate |
2018-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201800139-A |
| titleOfInvention |
Filter and manufacturing method thereof, and device for dry etching and method for dry etching |
| abstract |
The present invention provides a filter capable of suppressing fluorinated saturated hydrocarbons when filtering a composition containing a high concentration of fluorinated saturated hydrocarbons even if at least a part of a portion in contact with the object to be filtered is made of a metal or a metal compound. break down. The filter of the present invention includes a portion made of a metal or a metal compound that is in contact with an object to be filtered, and an amine compound adsorbed on the surface of the portion. The method for producing a filter of the present invention includes a step of bringing an amine compound into contact with the surface of a metal or metal compound portion that is in contact with the object to be filtered. |
| priorityDate |
2016-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |