| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_962adbf7d50e742218f3d536a63df612 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67712
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-31 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2017-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e367919e6b9d8118d2e3d7f80522f05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2906109903e12ba853651620278c72e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_705187f311d849e1d907985dd800ecef |
| publicationDate |
2017-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201742151-A |
| titleOfInvention |
Composite film for forming protective film, method for producing semiconductor wafer with protective film, and method for manufacturing semiconductor device |
| abstract |
The present invention provides a composite sheet for forming a protective film, which is obtained by providing a film for forming a protective film having an energy ray-curable property on a support sheet, and the support sheet has a light-shielding layer in a region in the vicinity of the peripheral portion. |
| priorityDate |
2016-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |