| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_54b2683b98d72a1421850c0cf08d3405 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67219
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate |
2017-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8f918283b9684a4b5207629223dd33d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24e1ed06203a2c3fafc340f4bb274881 |
| publicationDate |
2017-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201742141-A |
| titleOfInvention |
Nozzle and workpiece honing device |
| abstract |
A nozzle capable of reducing the amount of deactivation of the activating gas contained in the liquid and reducing the power loss at the time of generating the activated gas is realized. The nozzle 1 of the present invention includes a liquid flow path 12 for circulating a liquid, and a gas flow path 14 for allowing a gas to flow and communicating with the liquid flow path 12 to send the gas into the liquid flow path 12; The plasma generating mechanism 20 generates plasma in the gas that is sent out from the gas flow path 14 into the liquid flow path 12, and the plasma generating mechanism 20 includes a first electrode 22 in which the liquid flow is generated. The second electrode 24 is disposed in the liquid flow path 12 and is exposed in the gas flow path 14; and the power source 26 is opposite to the first electrode 22 and the second electrode A predetermined voltage is applied between the electrodes 24, and the gas in which the plasma is generated is mixed with a bubble of a predetermined diameter into the liquid, and the liquid is discharged. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I765530-B |
| priorityDate |
2016-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |