http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201741431-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L79-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2017-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af4541a8495b615ad8c567da073a6689 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8003f324a976c7286a4efc791ab3cda4 |
| publicationDate | 2017-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201741431-A |
| titleOfInvention | Liquid composition for imparting alcoholic property to semiconductor substrate material and surface treatment method for semiconductor substrate using the same |
| abstract | The present invention provides a liquid composition for imparting alcohol repellency to a semiconductor substrate material, and a surface treatment method for a semiconductor substrate using the liquid composition, the liquid composition comprising the surfactant (A) 0.01 to 15% by mass, and a compound (B) 0.0001 to 20% by mass; the surfactant (A) has a substituent represented by the formula (1) and an anionic hydrophilic group; wherein, n is an integer of 3 or more and 20 or less; B) has a weight average molecular weight of 200 or more and 500,000 or less, and has an amine group of 4 mmol or more and 30 mmol or less per 1 g, and is selected from the group consisting of a polyethyleneimine and a compound having a substituent represented by the formula (2) or (3) In the formula, R1 and R2 each independently represent hydrogen or an alkyl group, an alkenyl group, an alkynyl group or an aryl group having 1 to 6 carbon atoms; in the formula, R3 and R4 is each independently hydrogen or an alkyl, alkenyl, alkynyl or aryl group having 1 to 6 carbon atoms; X- is a fluoride ion, a chloride ion, a bromide ion, an iodide ion, a fluoroboric acid ion, a phosphate ion , acetate ion, trifluoroacetate ion, sulfate ion, hydrogen sulfate ion, methane sulfate Sub, hydroxide ion, perchlorate ion or nitrate ion. |
| priorityDate | 2016-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 227.