| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2017-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30b050099288e3573fa91c7493d04eb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e85659a4ef6f418194988e88bbad2e12 |
| publicationDate |
2017-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201740482-A |
| titleOfInvention |
Method and system for detecting defects on a substrate |
| abstract |
The invention discloses a detection method, which comprises: receiving a plurality of detection images of a substrate. The method includes generating a first noise image from a first image from the first channel and generating an additional noise image from the additional image from the additional channel. The method further includes: generating a first signal to noise ratio (SNR) image from the first noise image, and generating an additional SNR image from the additional noise image; and identifying the first SNR image and the additional SNR image One or more first pixel candidates. The method further includes: based on the one or more identified first pixel candidates and the one or more identified additional pixel candidates, image data from the first SNR image at a common pixel candidate site Image data from the additional SNR image is combined to form a combined image for detecting defects on the substrate. |
| priorityDate |
2016-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |