| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2017-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cac2d1155bb240734a549948c77bbd6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4057909ad78acbdfd509d7d12836dfe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfad1fdfef6126bcbec463e5b8ae370c |
| publicationDate |
2017-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201738340-A |
| titleOfInvention |
Grinding composition |
| abstract |
An object of the present invention is to provide a polishing rate of the material (a) to (b) when polishing an object including (a) a material having a ruthenium-nitrogen bond and (b) another material. The technique of increasing the ratio of the grinding speed of materials is aimed at. The solution is a polishing composition for polishing a polishing composition comprising (a) a material having a ruthenium-nitrogen bond and (b) a polishing object of another material, and comprising an organic acid fixed Cerium oxide, and a specific selection ratio enhancer that increases the ratio of the polishing rate of the above (a) material to the polishing rate of the above (b) material. |
| priorityDate |
2016-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |