| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate |
2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1625d1e75be42e0ed2b5614badf3509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06212cc719d72b7e08bc98b425d55246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4d130649bb9e899b86aef471aa82870
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2abe108fb70a7248b7b8108b3479ff26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55809532badf84b169aa0d2a06573dd1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f87f9d8c3024b6a66ca0354ec94e2f6 |
| publicationDate |
2017-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201732887-A |
| titleOfInvention |
Method of forming semiconductor device |
| abstract |
Embodiments of the invention relate to methods of fabricating semiconductor components. The method includes forming a layer of flowable material over the substrate. The substrate has a first region and a second region. The upper surface of the flowable material layer in the first region is higher than the upper surface of the flowable material layer in the second region. The method also includes forming a plurality of layers of flowable material in the first region and performing an annealing process to reflow the layer of flowable material, wherein the plurality of grooves are filled with a layer of flowable material. |
| priorityDate |
2016-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |