| abstract |
A biosensor device includes: a substrate; a sensing transistor formed on the substrate, and including a lower gate structure, an upper gate structure, and the lower gate structure and the upper gate a semiconductor layer between the structures, the lower gate structure is electrically connected to the upper gate structure; an isolation layer is formed on the sensing transistor to cover the sensing transistor, and includes a first opening And a main interface layer disposed in the first opening to receive the biomolecule to be sensed, the main interface layer being electrically connected to the upper gate structure. |