http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201732096-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-10 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-077 |
filingDate | 2016-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15e029d4f153952f2b1eacebc8791f9b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edea4fd11cc507234849a58f2b9a352b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06cf606e8ba22b36c8da4c131721b0fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d41a93456f35d20161990830ce2ea21d |
publicationDate | 2017-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-201732096-A |
titleOfInvention | 坩埚Management system, 坩埚 management method, 矽 矽 glass 坩埚 manufacturing method, bismuth ingot manufacturing method, and homoepitaxial wafer manufacturing method |
abstract | The problem to be solved by the present invention is that it is impossible to investigate the cause of the cause by the inability to investigate the cerium oxide glass crucible before deformation. The 坩埚 management system has: an internal reflected light detecting unit that irradiates a laser to the inner surface of the yttrium-glass yttrium to detect the reflected light on the inner surface; an internal distance calculating unit calculates the inner surface distance based on the detection result; the coordinate calculating unit is based on the inner surface The distance and the three-dimensional coordinates are used to calculate the inner surface coordinates, the three-dimensional coordinates are the basis for calculating the distance of the inner surface, and indicate the position of the internal reflected light detecting unit detecting the reflected light of the inner surface; the inner surface image data acquiring unit acquires the yttrium oxide Image data of the inner surface of the glass crucible; and a data information storage unit storing the following information as the data information of each of the bismuth oxide glass sheets, the information being the image data and the representation to be acquired by the inner surface image data acquiring unit The inner surface coordinates of the imaged portion of the image data are associated with each other. |
priorityDate | 2015-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.