| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75750aafb2142261c702b868240c0c9b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02581 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2016-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_182571f8ea31660b96d995639e4d5efc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9aaad351f14aa1483d89f02d213cc117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2d2ac3bd2255bf6ec0408ca498fbe7f |
| publicationDate |
2017-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201730961-A |
| titleOfInvention |
Manufacturing method for flattening a semiconductor surface |
| abstract |
A method for fabricating a semiconductor structure, such as a semiconductor-on-insulator structure, comprising a device layer having a planar surface is provided. The method provided involves flattening the surface of a semiconductor substrate by using a stress-enhanced surface diffusion at a high temperature. The purpose of this method is to achieve atomic-level surface flatness (for example, flatness in the range between 1.0 angstrom and 1.5 angstroms based on the rms measurement in a 30um X 30um AFM measurement), which is advanced (Asian 28 nm) Required for CMOS device fabrication. |
| priorityDate |
2015-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |