http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201730943-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 |
| filingDate | 2017-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_075a212b8995dbaa735ee343655af1ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8f8562f8a6a993dfda617ddfa79bdcc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e92afad1a477a9db3e8e21b685e1d63f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edcb51e4210ab460337f0464f367c6e0 |
| publicationDate | 2017-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201730943-A |
| titleOfInvention | Film forming apparatus, film forming method, and non-transitory computer readable memory medium |
| abstract | The film forming apparatus of the present invention is a film forming apparatus which sequentially supplies at least two types of reaction gases which react with each other to deposit a film on a substrate, and includes a rotary table which is rotatably provided in the container, and a recess having a through hole at the bottom is formed on the upper surface; the substrate supporting assembly is detachably mounted on the recess, and has a mounting portion for mounting the substrate thereon, and has a first protrusion on the lower surface; the driving mechanism Lifting and rotating the rotary table; the cover assembly is disposed in the container below the rotary table, and has a second protrusion on the upper surface; and the control portion is configured by the drive mechanism After the rotating table is lowered, the rotating table is rotated to bring the first protrusion into contact with the second protrusion, and the substrate supporting assembly is moved, so that the substrate supporting assembly rotates only a certain angle with respect to the rotating table. . |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I790703-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I780314-B |
| priorityDate | 2016-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.