http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201726905-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 |
| filingDate | 2016-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_358eb94eb84d648f1ad23ad0ffc95ebf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8393602f92ff95fd02e57449c3824423 |
| publicationDate | 2017-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201726905-A |
| titleOfInvention | Surface treatment agent and surface treatment method |
| abstract | An object of the present invention is to provide a surface treatment agent capable of effectively preventing a pattern of an inorganic pattern or a resin pattern provided on a substrate from collapsing; and a surface treatment method using such a surface treatment agent. Further, as another object, an object of the present invention is to provide a surface treatment agent capable of highly oxime-alkylating a surface of a substrate to be processed; and a surface treatment method using such a surface treatment agent. The present invention employs a surface treatment agent which is used for a surface treatment of a target object, and which contains a ruthenium alkylating agent and a nitrogen-containing heterocyclic compound which does not contain a ruthenium atom. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I714929-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11670498-B2 |
| priorityDate | 2015-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 261.